Laboratory of Physics of Condensed Matter and Renewable Energy, Faculty of Sciences and Technology, Hassan II University of Casablanca, 146 Mohammedia, Casablanca, Morocco ...
Abstract: A surface pretreatment is a critical process in low-temperature Cu/SiO2 hybrid bonding, significantly improving the quality of bond for both the Cu–Cu and SiO2–SiO2 interfaces. Previously, ...
Abstract: Post-metallization annealing (PMA) offers significant resistivity improvements for molybdenum word lines (WLs) in 3D NAND Flash, but its impact on device reliability remains unclear. This ...
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